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Articles by XEI Scientific

How Downstream Plasma Cleaning Works

by XEI Scientific
Problem: Users in EM facilities with several current generation tools including FE SEM and dual beam FIB/SEM will, despite taking precautions to insert only clean specimens, sometimes get contamination introduced into their microscopes. This manifests itself as a dark rectangle on areas which have been exposed to the incident beam. How can this be prevented? Can it be removed from the previously exposed samples?