Axetris Mass Flow Controllers, Meters, & ManifoldsAxetris offers OEM mass flow meters (MFM), controllers (MFC) and manifolds for gases of outstanding value to the customer. The proprietary, platinum-based MEMS chip technology guarantees excellent accuracy and repeatability in combination with high speed and extended dynamic range. The advantages of the platinum-based MEMS technology, combined with smart software processing and robust packaging, make Axetris mass flow meters and controllers an ideal choice for demanding OEM applications. Key features include:

  • Excellent Reproducibility: MFM Repeatability +/- 0.01% F.S. & MFC Repeatability +/- 0.015% F.S., combined with long-term stability to eliminate the need to recalibrate
  • Quick Reaction Time: MFM 4ms response time and less than 150ms to a stable state for real-time control of gas flows
  • Unmatched Dynamic Range: Turndown ratio of better than 1000:1 to achieve instrument flexibility and reduce controller variants


See them at Pittcon 2018 at Booth 2433