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New WaferPlate™ Programmable Bake Plate Announced

Designed specifically for 12" silicon wafers

by Torrey Pines Scientific
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WaferPlate™ Programmable Bake Plate Carlsbad CA — Torrey Pines Scientific, Inc. announces its new WaferPlate™ Programmable Bake Plate with uniform heating across the surface of better than 1% over a heating range from room temperature to 350°C. It is ideal for precisely heating 12” (304.8mm) and smaller silicon wafers, electronic chips, displays, adhesives, and for doing photo-resists and more.

The WaferPlate™ Model HP90 has a large circular 13.875” (352.4mm) milled-flat plate aluminum surface with temperature uniformity better than 1% across the center 12” (304mm) making it ideal for working with 12” or smaller silicon wafers. The unit is controllable remotely from a PC or industrial controller via the RS232 I/O port using the command set provided.  Also provided is a benchtop controller which is fully programmable, holding 5 routines of 10 steps each in memory for instant and repeatable recall and use.  Each program can be made to repeat itself automatically from 1 to 98 times or infinitely.

The plate surface can be set from room temperature to 350°C and can be set and controlled directly to 1°C. Accuracy is better than 1% of the heater setting over the entire range. Temperature sensing is by platinum RTD built into the heater plate. The HP90 has temperature ramping from 1°C/hour to 450°C/hour, count down timer with alarm and user settable Auto-Off and RS232 I/O port. The units are supplied with temperature calibration certificates traceable to NIST.  

The WaferPlate™ Model HP90 is available in 100, 115, and 230 VAC, 1500 watts, 50/60 Hz models.  UL, CSA, and CE certification is pending.

To obtain additional information contact:

Torrey Pines Scientific, Inc., 2713 Loker Avenue West, Carlsbad, CA 92010 USA

Phone: 760-930-9400
Toll Free: 866-573-9104
Fax: 760-930-9480

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