Axetris Mass Flow Controllers, Meters & Manifolds
The advantages of the platinum-based MEMS technology, combined with smart software processing and robust packaging, make Axetris mass flow meters and controllers an ideal choice for demanding OEM applications
Axetris offers OEM mass flow meters (MFM), controllers (MFC) and manifolds for gases of outstanding value to the customer. The proprietary, platinum-based MEMS chip technology guarantees excellent accuracy and repeatability in combination with high speed and extended dynamic range. The advantages of the platinum-based MEMS technology, combined with smart software processing and robust packaging, make Axetris mass flow meters and controllers an ideal choice for demanding OEM applications. Key features include:
- Excellent Reproducibility: MFM Repeatability +/- 0.01% F.S. & MFC Repeatability +/- 0.015% F.S., combined with long-term stability to eliminate the need to recalibrate
- Quick Reaction Time: MFM 4ms response time and less than 150ms to a stable state for real-time control of gas flows
- Unmatched Dynamic Range: Turndown ratio of better than 1000:1 to achieve instrument flexibility and reduce controller variants
See them at Pittcon 2018 at Booth 2433
